TRANSDUCERS '97: International Conference on Solid-State Sensors and ActuatorsMIDDELHOEK, S; CAMMANN, K.Sensors and actuators. A, Physical. 1998, Vol 66, Num 1-3, issn 0924-4247, 372 p.Conference Proceedings

Error analysis of material parameter determination with quartz-crystal resonatorsLUCKLUM, R; BEHLING, C; HAUPTMANN, P et al.Sensors and actuators. A, Physical. 1998, Vol 66, Num 1-3, pp 184-192, issn 0924-4247Conference Paper

Microfluidic motion generation with acoustic wavesXU ZHU; EUN SOK KIM.Sensors and actuators. A, Physical. 1998, Vol 66, Num 1-3, pp 355-360, issn 0924-4247Conference Paper

People-counting system using multisensing applicationHASHIMOTO, K; KAWAGUCHI, C; MATSUEDA, S et al.Sensors and actuators. A, Physical. 1998, Vol 66, Num 1-3, pp 50-55, issn 0924-4247Conference Paper

Silicon mirrors and micromirror arrays for spatial laser beam modulationKURTH, S; HAHN, R; KAUFMANN, C et al.Sensors and actuators. A, Physical. 1998, Vol 66, Num 1-3, pp 76-82, issn 0924-4247Conference Paper

A surface-acoustic-wave gyro sensorKUROSAWA, M; FUKUDA, Y; TAKASAKI, M et al.Sensors and actuators. A, Physical. 1998, Vol 66, Num 1-3, pp 33-39, issn 0924-4247Conference Paper

An electroformed CMOS integrated angular rate sensorCHANG, S; CHIA, M; ZARABADI, S et al.Sensors and actuators. A, Physical. 1998, Vol 66, Num 1-3, pp 138-143, issn 0924-4247Conference Paper

An integrated resonant accelerometer microsystem for automotive applicationsOHLCKERS, P; HOLM, R; JAKOBSEN, H et al.Sensors and actuators. A, Physical. 1998, Vol 66, Num 1-3, pp 99-104, issn 0924-4247Conference Paper

Electrothermal oscillator for film-thickness monitoringKIM, J; WISE, K. D.Sensors and actuators. A, Physical. 1998, Vol 66, Num 1-3, pp 56-62, issn 0924-4247Conference Paper

Vibration sensor using optical-fiber cantilever with bulb-lensKIMURA, M; TOSHIMA, K.Sensors and actuators. A, Physical. 1998, Vol 66, Num 1-3, pp 178-183, issn 0924-4247Conference Paper

Design and fabrication of micromirror array supported by vertical springsSHIN, J.-W; CHUNG, S.-W; KIM, Y.-K et al.Sensors and actuators. A, Physical. 1998, Vol 66, Num 1-3, pp 144-149, issn 0924-4247Conference Paper

Human information sensorMORINAKA, K; HASHIMOTO, K; TANAKA, S et al.Sensors and actuators. A, Physical. 1998, Vol 66, Num 1-3, pp 1-8, issn 0924-4247Conference Paper

Photolithographic packaging of silicon pressure sensorsKRASSOW, H; CAMPABADAL, F; LORA-TAMAYO, E et al.Sensors and actuators. A, Physical. 1998, Vol 66, Num 1-3, pp 279-283, issn 0924-4247Conference Paper

All-fibre acousto-optic modulator using ZnO piezoelectric actuatorsWUETHRICH, C. R; MULLER, C. A. P; FOX, G. R et al.Sensors and actuators. A, Physical. 1998, Vol 66, Num 1-3, pp 114-117, issn 0924-4247Conference Paper

CMOS sensor systemsHOSTICKA, B. J.Sensors and actuators. A, Physical. 1998, Vol 66, Num 1-3, pp 335-341, issn 0924-4247Conference Paper

MicroJoinery : concept, definition, and application to microsystem developmentGONZALEZ, C; SMITH, R. L; HOWITT, D. G et al.Sensors and actuators. A, Physical. 1998, Vol 66, Num 1-3, pp 315-332, issn 0924-4247Conference Paper

New bulk accelerometer for triaxial detectionPLAZA, J. A; CHEN, H; ESTEVE, J et al.Sensors and actuators. A, Physical. 1998, Vol 66, Num 1-3, pp 105-108, issn 0924-4247Conference Paper

Offset reduction of Hall plates in three different crystal planesBELLEKOM, S; SARRO, P. M.Sensors and actuators. A, Physical. 1998, Vol 66, Num 1-3, pp 23-28, issn 0924-4247Conference Paper

A bulk-micromachined three-axis accelerometer using silicon direct bonding technology and polysilicon layerKIJIN KWON; SEKWANG PARK.Sensors and actuators. A, Physical. 1998, Vol 66, Num 1-3, pp 250-255, issn 0924-4247Conference Paper

Gas spectrometry based on pyroelectric thin-film arrays integrated on siliconWILLING, B; KOHLI, M; MURALT, P et al.Sensors and actuators. A, Physical. 1998, Vol 66, Num 1-3, pp 109-113, issn 0924-4247Conference Paper

The influence of gas-surface interaction on gas-film damping in a silicon accelerometerVEIJOLA, T; KUISMA, H; LAHDENPERÄ, J et al.Sensors and actuators. A, Physical. 1998, Vol 66, Num 1-3, pp 83-92, issn 0924-4247Conference Paper

Concave corner compensation between vertical (010)-(001) planes anisotropically etched in Si(100)NIKPOUR, B; LANDSBERGER, L. M; HUBBARD, T. J et al.Sensors and actuators. A, Physical. 1998, Vol 66, Num 1-3, pp 299-307, issn 0924-4247Conference Paper

Operation of α(6H)-SiC pressure sensor at 500°COKOJIE, R. S; NED, A. A; KURTZ, A. D et al.Sensors and actuators. A, Physical. 1998, Vol 66, Num 1-3, pp 200-204, issn 0924-4247Conference Paper

An integrated thermopile structure with high responsivity using any standard CMOS processAKIN, T; OLGUN, Z; AKAR, O et al.Sensors and actuators. A, Physical. 1998, Vol 66, Num 1-3, pp 218-224, issn 0924-4247Conference Paper

Electrofluidic full-system modelling of a flap valve micropump based on Kirchhoffian network theoryVOIGT, P; SCHRAG, G; WACHUTKA, G et al.Sensors and actuators. A, Physical. 1998, Vol 66, Num 1-3, pp 9-14, issn 0924-4247Conference Paper